Semiconductor Metrology and Inspection Market Size – By Type, Technology, Application, End Use Analysis, Share, Growth Forecast, 2025 – 2034

Semiconductor Metrology and Inspection Market Size

The global semiconductor metrology and inspection market was valued at USD 9.8 billion in 2024 and is estimated to grow at a CAGR of 6.9% to reach USD 18.7 billion by 2034. The growth of the market is attributed to factors such as increased complexity in semiconductors and rising investment in semiconductor industry.
 

The semiconductor metrology and inspection market is witnessing significant growth, driven by the increasing demand for advanced semiconductor chips.  Semiconductor designs are becoming more complex and miniaturized to meet the consumer demand for compact and energy efficient devices. With increasing complex semiconductor designs, demand for advanced semiconductor metrology and inspection solutions are increasing to identify microscopic defects in wafers, masks, and chip structures and to reduce scrap rates and to improve overall production yield.
 

According to the report published by Semiconductor Industry Association in August 2024, the global semiconductor market is expected to reach at USD 1 trillion by 2030. Thus the growing semiconductor industry will boost the demand for market.
 

Growing investments in semiconductor manufacturing are accelerating the growth of semiconductor metrology and inspection market. Governments and private entities are investing in semiconductor fabs to address supply chain disruptions and technological advancements. In November 2024, United States Department of Defense announced a USD 160 million investment to boost US domestic semiconductor manufacturing.
 

Also, in April 2024, U.S. Secretary of Commerce grants USD 6.4 billion to Samsung Electronics to expand its manufacturing capacity and capabilities for essential chips for the automotive, consumer technology, IoT, aerospace, and other vital industries. Such initiatives by governments will propel the growth of semiconductor industry which will support the market growth of semiconductor metrology and inspection during the forecast period.
 

Semiconductor Metrology and Inspection Market Trends

• The usage of high resolution sensors in semiconductor metrology and inspection is transforming the market. Advanced resolution sensors are enhancing wafer inspection accuracy, ensuring early-stage defect detection to prevent costly downstream consequences. In November 2024, Nordson Test & Inspection launched SQ3000M2 Automated Optical Inspection (AOI) and Metrology System. The system has features high-resolution sensors and Focus Variation Metrology (FVM) technology, the system enhances semiconductor inspection with precise 2D and 3D measurements, improving defect detection, yield, and process efficiency in microelectronics manufacturing.
   
• The semiconductor metrology and inspection market are experiencing a shift toward AI driven inspection. Usage of AI in semiconductor metrology and inspection enhances performance by effectively detecting anomalies and defects. AI-driven solutions improve accuracy in defect detection and PCB segmentation. For instance, in November 2024, Cohu launched AI Inspection software within its DI-Core analytics platform to enhance semiconductor metrology and inspection. Using deep learning and neural networks, it improves defect detection accuracy at production speeds. With AI-driven precision, manufacturers can achieve up to 2% higher first-pass yield.
   

Semiconductor Metrology and Inspection Market Analysis

Based on type, the market is segmented into wafer inspection system, mask inspection system, thin film metrology, bump inspection, and lead frame inspection.
 

• The water inspection system type segment accounted for USD 2.9 billion in 2023. Wafer defect inspection systems detect physical and pattern defects on wafers, captures defect coordinates (X, Y) for precise localization. It differentiates between random defects, which caused by particles and systematic defects, which caused by exposure and mask conditions). Patterned wafer inspection compares adjacent dies, while non-patterned systems inspect bare wafers. Advanced inspection is crucial for detecting defects and optimizing semiconductor manufacturing.
   
• Thin film metrology type segment accounted for USD 2.2 billion in 2021. Thin film metrology accurately measures thin film layers at nanometer precision. It utilizes ellipsometry, reflectometry, and spectrometry to analyze film properties.      Also, determines refractive index, absorption coefficient, and uniformity. It ensures consistency in thin film deposition and etching. This reduces production defects and enhances throughput.
   

Based on technology, the semiconductor metrology and inspection market is divided into optical, E-beam, and others.
 

• The optical technology is expected to account for 53% of the global semiconductor metrology and inspections market in 2024. Optical methods are used to measure, analyze, and inspect integrated circuits, semiconductor wafers, and packaging at nanometer precision. Technology helps to capture nanometer-scale defects with advanced optics. optical technology ensures mask and exposure alignment lithography Process.
   
• E-beam technology is expected to account for 28.6% of the global semiconductor metrology and inspections market in 2023. E-beam technology utilizes focused electron beams to detect defects, measure critical dimensions (CD), and analyze material properties at nanometer-scale precision.
   

Based on application, the semiconductor metrology and inspection market is segmented into integrated circuit manufacturing, Light Emitting Diode (LED) manufacturing, discrete devices, packaging and assembly, and others.
 

• Integrated circuit manufacturing segment dominated the market accounting for USD 3.1 billion in 2024.  Metrology and inspection are essential for minimizing defects, improving process efficiency, and ensuring the reliability of integrated circuits (IC). Measures height, depth, and topography of 3D ICs and advanced packaging structures. It ensures chip integrity before distribution in consumer and industrial applications.
   
• Packaging and assembly segment accounted for USD 2.1 billion in 2023. Semiconductor metrology and inspection ensure precise wafer thinning, die placement, and interconnect integrity in packaging and assembly. Advanced sensors, AOI, and X-ray inspection detect defects, optimizing yield, reliability, and miniaturization in semiconductor devices.
   

Based on end use, the semiconductor metrology and inspection market is segmented into semiconductor foundries, Integrated Device Manufacturers (IDMs), Third-Party Business (OSAT), Research & Development (R&D) institutions.
 

• Semiconductor foundries dominated the market accounting for USD 4 billion in 2024. Semiconductor metrology and inspection play an important role in semiconductor foundries. It ensures high yield, defect detection, and process optimization. Metrology tools in foundries are used to maintain precision in wafer fabrication, lithography, and packaging.
   
• Third-party Business (OSAT) segment is expected to grow rapidly at a CAGR of 7.2% during the forecast period. In the semiconductor industry, Third-party Business (OSAT) refers to Outsourced Semiconductor Assembly and Test (OSAT) companies that provide packaging, assembly, and testing services for semiconductor manufacturers. These third-party inspect or perform metrological operations on wafers, these party are specialized in these processes.
   

• In 2024, the U.S. semiconductor metrology and inspection market accounted for USD 2.6 billion. U.S. market is driven by increasing government investment in semiconductor industry. In August 2024, U.S. Department of Commerce, announced the allocation of USD 30 billion funds to boost semiconductor production. These government regulations are accelerating the adoption of high-precision metrology and inspection tools in foundries and OSAT facilities. Also, this investment surge is fostering technological advancements in metrology equipment, strengthening the U.S. semiconductor supply chain.
   
• The Germany semiconductor metrology and inspection market is expected to reach USD 1.1 billion by 2034. Germany has positioned itself as a leader in automotive, industrial, and consumer electronics is driving demand for advanced semiconductor manufacturing. High-precision metrology solutions will boost, along with rising demand of semiconductors. Companies such as Infineon, GlobalFoundries, and Bosch are expanding local foundries, increasing the need for metrology solutions in wafer fabrication and advanced packaging.
   

• The China semiconductor metrology and inspection market is expected to grow at a CAGR of 5.1% during the forecast period. Government policies such as “Made in China 2025” are empowering China to become a self-sufficiency in semiconductor sector. Such government policies are driving heavy investments in advanced metrology and inspection solutions to reduce reliance on foreign technology.
   
• Japan is expected to account for a share of 10.8% of the semiconductor metrology and inspection market in Asia Pacific. Increasing demand of 3D IC, wafer-level packaging (WLP), and heterogeneous integration in Japan is fuelling the need for metrology solutions in OSAT and foundries. Additionally, Japan is domination in automotive semiconductors and consumer electronics is increasing the need for stringent metrology and inspection solutions to ensure quality and reliability.
   
• South Korea semiconductor metrology and inspection market is expected to grow at a CAGR of 7.7% during the forecast period. South Korea has announced the allocation of funding of USD 450 billion to boost chipmakers competitiveness. Such government investments are accelerating the development of next-generation metrology tools for high-end chip manufacturing.
   

Semiconductor Metrology and Inspection Market Share

The semiconductor metrology and inspections market is competitive and highly fragmented with the presence of established global players as well as local players and startups. The top 7 companies in the global market are KLA Corporation, Applied Materials, Inc., ASML Holding N.V, Hitachi Ltd., Thermo Fisher Scientific Inc., Onto Innovation, Inc, and Camtek Ltd., collectively accounting for a share of 61%. Companies are collaborating to gain expertise in the technology for semiconductor metrology and inspection.
 

For instance, In January 2025, Koh Young partnered with NTV USA to expand its semiconductor metrology and inspection solutions in the U.S. The collaboration brings Meister Series and ZenStar systems, enhancing SiP, WLP, and die stacking inspection. Leveraging deep learning and 3D measurement technology, Koh Young aims to improve yield, precision, and defect detection in advanced semiconductor packaging.
 

Additionally, companies are partnering together to expand their business in the market, For instance, in July 2023, Applied Materials and Fraunhofer IPMS launched Europe’s largest semiconductor metrology hub in Dresden’s Silicon Saxony. Equipped with eBeam metrology systems, including VeritySEM CD-SEM, the hub enhances wafer-level inspection, process control, and R&D for ICAPS markets. This collaboration accelerates learning, metrology advancements, and semiconductor manufacturing precision across Europe.
 

KLA Corporation is launching new technology to satisfy the end use industry’s demands and strengthen its product portfolio. For instance, in December 2022, KLA launched the Axion T2000 X-ray metrology system to enhance inline process control for 3D NAND and DRAM manufacturing. Using CD-SAXS technology, it delivers high-resolution 3D measurements of vertical structures, optimizing critical dimension monitoring.
 

Applied Materials, Inc. primarily competes in the market by collaborating with other companies to gain expertise in the area.
 

ASML Holding N.V focuses on seamless integration of metrology and inspection with its advanced lithography solutions to enhance chip quality, yield, and production efficiency. The company is investing in cutting-edge inspection tools and collaborates with industry leaders to develop early-stage solutions for next-generation semiconductor manufacturing.
 

Semiconductor Metrology and Inspection Market Companies

Prominent companies in the semiconductor metrology and inspection industry include:

• KLA Corporation
• Applied Materials, Inc.
• ASML Holding N.V
• Hitachi Ltd.
• Thermo Fisher Scientific Inc.
• Onto Innovation, Inc
• Camtek Ltd.
   

Semiconductor Metrology and Inspection Industry News

• In March 2024, Hitachi High-Tech launched the LS9300AD wafer inspection system, enhancing semiconductor metrology and inspection with high-sensitivity detection of low-aspect microscopic defects using DIC optics. It improves inspection speed, cost efficiency, and yield, addressing industry demands for advanced defect detection in wafer manufacturing amid increasing semiconductor production complexity.
   
• In September 2024, Marposs expanded its semiconductor metrology and inspection solutions with advanced non-contact sensors and gauges for wafer processing. The acquisition of Solarius Development Inc. strengthens its offerings, including the Phoenix Desktop 3D system, which enhances thin-film metrology, wafer characterization, and defect detection, ensuring high precision and automation in semiconductor manufacturing.
   

This semiconductor metrology and inspection market research report includes in-depth coverage of the industry with estimates & forecasts in terms of revenue (USD Million) from 2021 to 2034, for the following segments:

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Market, By Type

• Wafer inspection system
• Mask inspection system
• Thin film metrology
• Bump inspection
• Lead frame inspection

Market, By Technology

• Optical
• E-beam
• Others

Market, By Application

• Integrated circuit manufacturing
• Light Emitting Diode (LED) manufacturing
• Discrete devices
• Packaging and assembly
• Others

Market, By End Use

• Semiconductor foundries
• Integrated Device Manufacturers (IDMs)
• Third-Party Business (OSAT)
• Research & Development (R&D) institutions

The above information is provided for the following regions and countries:

• North America
  • U.S.
  • Canada
• Europe
  • UK
  • Germany
  • France
  • Italy
  • Spain
  • Russia
• Asia Pacific
  • China
  • India
  • Japan
  • South Korea
  • ANZ 
• Latin America
  • Brazil
  • Mexico
• MEA
  • UAE
  • Saudi Arabia
  • South Africa