Semiconductor ICP-MS Systems Market – By Component, By Product Type, By Technology, By Sales Channel, By Application, By End Use Industry – Global Forecast, 2025 – 2034

Semiconductor ICP-MS Systems Market Size

The global semiconductor ICP-MS systems market size was valued at USD 189.8 million in 2024 and is estimated to grow at 5.5% CAGR from 2025 to 2034.
 

Semiconductor industry is witnessing rapid growth across the globe. Semiconductors are the key to enabling technology in a broad range of products used across different industry verticals. According to Semiconductor Industry Association, the semiconductor sales in 2022 was US$ 574 Bn which was an increase of 3.3% compared to 2021. Semiconductor fabs require high performance elemental analysis systems for process control and contamination monitoring.
 

Semiconductor manufacturers are constantly developing new integrated circuit (IC) chips with smaller sizes, higher speeds, lower power consumptions, which is a major factor expected to drive the growth of global semiconductor ICP-MS systems market. The integrated circuit (IC) chips require high-purity materials, metals, and a range of process chemicals, such as ultrapure acids and solvents that aid in improving performance and reliability. Traditional techniques such as Atomic Absorption Spectroscopy and ICP-OES lack the sensitivity needed for ultra-trace detection. Semiconductor ICP-MS systems help manufacturers in analyzing and controlling the impurities on a real-time basis helping in improving the quality.
 

Likewise, semiconductor manufactures approach towards adoption of advanced packaging solutions such as 3D ICs, chiplets, and heterogenous integration due to high reliability compared to traditional semiconductor packaging is another factor responsible to drive the market growth. Adoption of advanced packaging solution is not easy as it brings risk of contamination leading to potential electromigration, corrosion, and yield loss. Semiconductor ICP-MS systems ensure contamination free packaging preventing leakage currents and early device failures. Moreover, the leading packaging firm’s preference for ICP-MS in order to ensure reliability in the next generation semiconductor devices by detecting metallic impurities in bond wires and interconnect materials is expected to support the growth of the target market.
 

Semiconductor ICP-MS Systems Market Trends

• The growing shift towards adoption of small process nodes such as 3nm, 2nm and below in semiconductor chips is responsible for increasing demand for sub-parts-per-trillion (sub-ppt) detection limits in semiconductor manufacturing. This system aid in contamination control by detecting the smallest traces of metallic impurities in process chemicals, gases, and wafers that impact the chip yield and performance. For instance, NexION 2000 ICP-MS system aids in detecting a broad range of elements at ultra trace levels.
   
• As semiconductor manufacturers transition towards small process nods (sub-5nm and upcoming 3nm & 2nm process nodes), ultra trace detection at ppt & sub-ppt level is anticipated to become a critical requirement. This is expected to create new opportunities for system manufacturers where they can focus on development of multi-quadrupole, high-resolution, and TOF (Time-of-Flight) ICP-MS to enhance mass separation and sensitivity
   
• AI & ML is gaining traction at a global level as they help to improve efficiency. System manufacturers are following similar trends and integrating AI & ML to ICP-MS systems as semiconductor manufacturers are inclining towards automation and seek advanced solution for contamination detection and process optimization.
   
• Integration of AI & ML for automation is witnessing rapid growth, system manufacturers can invest in inline/real-time ICP-MS solutions for semiconductor fabs to enhance process efficiency and enable real-time contamination monitoring.
   

Semiconductor ICP-MS Systems Market Analysis

Based on technology, the semiconductor ICP-MS systems market is divided into quadrupole technology, magnetic sector technology, and Time-of-Flight (ToF) technology.
 

• The quadrupole technology market dominated the global market accounting 43.9% market share in 2024. Increasing demand from pharmaceutical & semiconductor manufacturers for semiconductor ICP-MS systems with quadrupole technology for detection of ultra-trace impurity is expected to support the growth of quadrupole technology market.
   
• The magnetic sector technology market is expected to reach USD 51.4 million in 2034. The magnetic sector technology is gaining traction among semiconductor manufacturers due to its ability for sub-ppt impurity detection, especially for EUV lithography and rare-earth material analysis.
   
• Time-of-Flight (ToF) technology market accounted for USD 62.8 million in 2022. The higher market share of this market is attributed to increasing the adoption of Time-of-Flight (ToF) technology in medical & biopharmaceutical industry as ICP-ToF-MS help for biocompatibility testing of implantable medical chips and biosensors.
   

Based on component, the semiconductor ICP-MS systems market is divided into hardware and software. Increasing demand for Ultra-Trace Contamination Detection and integration of AI & ML for advanced analysis is expected to driver the growth of component segment.
 

• The software market is expected to dominate the market in 2034, accounting for the revenue of 163.9 million. The software market growth can be attributed to the integration of AI & ML as an automated solution. Integration of AI & ML will help in real-time detection of contamination and process anomaly prediction further improving yield optimization.
   
• For example, Syngistix for ICP-MS software is part of the Syngistix atomic spectroscopy software platform which is designed to offer harmonized user experience across PerkinElmer’s AA, ICP and ICP-MS portfolios, making it easier to transition from technique to technique.
   
• The ICP-MS hardware market is expected to reach USD 157.5 million in 2034. The hardware market growth is attributed to increasing demand from semiconductor & electronics manufacturers for advanced systems that reduce cycle times in contamination testing and process control.
   

Based on product type, the semiconductor ICP-MS systems market is divided into single quadrupole ICP-MS, triple quadrupole ICP-MS, multi-quadrupole ICP-MS, high resolution ICP-MS, multi-collector ICP-MS, and others.
 

• The single quadrupole ICP-MS market accounted for USD 43.7 million in 2021. The market growth is attributed to increasing demand for basic contamination monitoring from chemical & pharmaceutical industry.
   
• The multi-quadrupole ICP-MS market accounted for USD 32.6 million in 2023. The higher growth of the market is attributed to increasing demand from semiconductor manufacturers for multi-element, high-throughput semiconductor material testing.
   
• The market for triple quadrupole ICP-MS is expected to reach USD 96.4 million in 2034. The growth of this market is attributed to the triple quadrupole ICP-MS configuration that has two quadrupole mass filters, one before and one after the collision/reaction cell.
   
• The triple quadrupole configuration can perform two mass filtering steps, this technique is also known as tandem ICP-MS or ICP-MS/MS. For example, the Agilent 8900 triple quadrupole ICP-MS (ICP-QQQ) is the widely used tandem ICP mass spectrometer.
   
• 8900 offers the same matrix tolerance and robustness as Agilent’s market-leading single quadrupole ICP-MS systems which are combined with the industry’s most effective helium (He) collision mode. But the 8900 adds tandem mass spec operation (ICP-MS/MS) for unmatched control of reaction chemistry in the collision reaction cell (CRC), making it the world’s most powerful and flexible multi-element analyzer.
   
• The high resolution ICP-MS market is expected to reach USD 43.1 million in 2034. The market growth is attributed to increasing R&D activities in the semiconductor industry and wide applicability of high resolution ICP-MS for isotopic purity studies in dopants and advanced materials.
   

Based on sales channel, the semiconductor ICP-MS systems market is divided into direct sales, distributors, and online sales.
 

• The direct sales market is expected to reach USD 124.5 million in 2034. The market growth is attributed to growing semiconductor fab preferences for customized solutions. With the increasing complexity in ICP-MS systems direct sales help in ensuring dedicated support and after-sales service.
   
• The distributor market accounted for USD 51.7 million in 2021. The significant growth of the market is due to the increasing manufacturers’ approach towards business expansion. With the increasing overseas expansion of players distributors aid faster procurement cycles and regulatory compliance assistance.
   
• The online sales market accounted for USD 57.9 million in 2023. The market growth is responsible due to the growing preference of small labs and academic institutions for online purchase due budget-friendly and availability of refurbished ICP-MS equipment options.
   

Based on application, the semiconductor ICP-MS systems market is divided into water analysis, environmental analysis, pharmaceutical and biomedical research, geological and mining research, food and beverage testing, petrochemical analysis, semiconductor analysis, others.
 

• The water analysis market accounted for USD 29.3 million in 2021. The market growth is attributed to rising concern for water quality among governments. The ICP-MS systems aid in ultra-trace detection of metals and contaminants in drinking water.
   
• The market for ICP-MS environmental analysis is expected to reach USD 38.6 million in 2034. The growth of market can be attributed to stringent government regulations pertaining to environmental pollution and toxic contaminants is anticipated to increase demand for ICP-MS-based air, soil, and water analysis.
   
• The market for ICP-MS pharmaceutical and biomedical research accounted for USD 14.3 million in 2021. The market growth can be attributed to wide applicability of ICP-MS systems in drug formulation and biomedical research in order to test impurities and trace elements in pharmaceutical products.
   
• The market for ICP-MS geological and mining research is expected to grow at a CAGR of 5.1% during the forecast period. The market growth is responsible due to increasing mining exploration activities across the globe and wide adoption of ICP-MS systems for monitoring toxic elements in mining regions.
   
• The market for ICP-MS food and beverage testing is expected to reach USD 28.9 million in 2034. The anticipated market growth is due to increasing demand for organic food. Consumer awareness pertaining to food safety is pushing the adoption of ICP-MS systems for food testing & safety assurance.
   
• The market for ICP-MS petrochemical analysis is witnessing faster growth in the coming years, due to the growing adoption of advanced system form petrochemical industry in order to detect sulfur, heavy metals, and contaminants at ultra-low levels.
   
• In market for ICP-MS semiconductor manufacturing is increasing focus on  material purity and dopant analysis to ensure high-quality, high-performance semiconductor chips is expected to increase adoption of advanced ICP-MS systems. The semiconductor analysis market is expected to grow at a GACR of 7.5% in the forecast period.
   

Based on end-user industry, the semiconductor ICP-MS systems market is divided into semiconductor industry, environmental testing laboratories, pharmaceutical industry, chemical industry, research institutions, and others.
 

• The semiconductor industry market is expected to dominate the market in 2034, accounting for the CAGR of 6.9%. Rising demand for high purity materials & chemicals is expected to increase demand for ICP-MS systems for advanced analysis for metal impurities in wafer fabrication is expected to support the growth of market.
   
• Stringent government regulations pertaining to environmental pollution are necessitating the air, water & soil analysis. With the help of ICP-MS systems environmental monitoring in increasing for precise, high-throughput elemental analysis. The market for ICP-MS environmental testing laboratories is expected to witness significant growth of USD 131.8 Mn in 2034.
   
• The market for ICP-MS pharmaceutical industry witnessed high growth of a CAGR 4.4% over the forecast period. The pharmaceutical industry is witnessing strict government regulations over drug safety and quality assurance. These strict regulations necessitate the adoption of advanced systems in order to trace metal and impurity in raw materials, formulations, and final drug products. Chemical manufacturers are facing tough environmental regulation policies from the government which is responsible for the adoption of ICP-MS systems in chemical plants for compliance testing.
   
• Increasing interest and studies in advanced materials, nanomaterials, and environmental changes is fueling the adoption of high-precision analytical instruments among academic and research labs, which is a major factor expected to drive the market growth in coming years.
   

The North America semiconductor ICP-MS systems market is projected to grow significantly, reaching USD 81.9 million by 2034. The high growth in the region is attributed to strict government regulations pertaining to semiconductor & pharmaceutical.
 

• The U.S. ICP-MS systems market is witnessing rapid growth due to increasing investment in biopharmaceutical which calls for advanced testing equipment that aid in drug testing and biomarker analysis. The U.S. accounted for the largest market share in North America with market size of USD 41 Mn in 2023.
   
• The market is expanding in Canada due to technological developments like ICPMS-2030. The ICPMS-2030 is the first system in the industry to include functions for assisting with analytical method development and diagnostics. The unique system developed by Shimadzu results in the industry’s lowest running costs. Furthermore, the development assistant simplifies the process of developing analytical methods and automatically diagnoses spectral interference, providing analytical results with exceptionally high reliability.
   

The semiconductor ICP-MS systems market in Europe is expected to experience significant growth of USD 118.9 Mn in 2034. Factors responsible for the regional growth of semiconductor ICP-MS systems are established food & beverage manufacturers, coupled with rising environmental concern.
 

• The Germany market expected to witness faster growth of CAGR 5.1% over the forecast period. The growth can be attributed to flourishing semiconductor industry along with increasing R&D investment supporting the development in high purity material testing.
   
• The U.K. semiconductor ICP-MS systems market is increasing high growth due to increasing merger & acquisition activities for players with the focus to acquire high market share. For instance, in November 2023, ICP acquired Team 6ix, a UK-based Martech and content operations consulting firm. This acquisition aims to enhance ICP's capabilities by integrating Team 6ix's expertise in marketing technology and consulting. The combined resources are expected to better serve clients in navigating the evolving martech landscape. The U.K. market is expected to witness significant growth of USD 13.3 Mn in 2034.
   
• France semiconductor ICP-MS systems semiconductor ICP-MS systems industry is witnessing significant growth due to increasing government focus on government focus on environmental sustainability. This focus is anticipated to increase demand for advanced systems that aid in testing for pollutants, water quality, and soil contamination.
   
• France market is witnessing faster growth due to increasing chemical manufacturing sector which calls for advanced system that help in contamination monitoring.
   
• Spain semiconductor ICP-MS systems market is expected to account for a CAGR of 4% in the forecast period. Rapid growth in food & beverage industry, coupled with stringent government regulations for food safety is considerably increasing the demand for advanced testing systems which is a major factor expected to drive the Spain market. Spain market is expected to reach USD 4.4 million by 2034.
   
• The factors supporting the growth of Italy semiconductor ICP-MS systems industry is attribute to rapid acceptance of collision and reaction cell technology as an enhancement to conventional quadrupole Inductively Coupled Plasma Mass Spectrometry (ICPMS) instrumentation. In 2024, the Italy market accounted for USD 3.8 million.
   

The market in Aisa-pacific is expected to experience rapid growth and account for a CAGR of 6.3% in the forecast period. The market growth in the region is attributed to countries such as China, Japan & Taiwan that dominate the global chip manufacturing production which calls for semiconductor ICP-MS systems for ultra-trace elemental analysis.
 

• The China semiconductor ICP-MS systems market is expected to grow at a CAGR of 6.5% during the forecast period. China market is witnessing moderate growth, driven by increasing adoption of new technique for micro-(10 -6), trace-(10 -9), and ultra-trace-scale (10 -12 ) element analysis with a variety of advantages, such as applicable to analyze the majority in the periodic table of elements, low detection limit, wide linear (dynamic) range, low interference, high accuracy, high speed and isotopic analysis.
   
• Japan market is growing exponentially due to rapid development in semiconductor & electronics industry. Semiconductor & Electronics manufactures focus on the introduction of advanced products which in turn is increasing demand for ICP-MS systems for ultra-trace metal analysis for high-tech manufacturing. In 2024, the Japan market accounted for USD 12.1 million.
   
• India industry is expected to grow due to increasing investment un semiconductor fabrication which results in growing adoption of ICP-MS for ultra-trace metal analysis.
   
• Australia semiconductor ICP-MS systems market is witnessing rapid expansion due to increasing environmental concern resulting in increasing adoption of advanced ICP-MS systems for water and air quality testing. Japan semiconductor ICP-MS systems industry accounted for 22% revenue share in the Asia Pacific market.
   
• The factors supporting the growth of South Korea market is attributed to increasing government spending on biopharmaceutical and life sciences research necessitating adoption of advanced system for ultrapure material analysis. The South Korea market accounted for 13% revenue share in 2023.
   

The semiconductor ICP-MS systems industry in Latin America is expected to experience significant and promising growth of 1.8% from 2025 to 2034. The reginal market growth is attributed to expansion of automotive & semiconductor manufacturers in the region is expected to increase demand for semiconductor ICP-MS systems for quality control.
 

• Brazil semiconductor ICP-MS Systems market is witnessing steady growth, driven by increasing due to chemical industry. The precision, sensitivity and lower limits of detection for a multitude of elements achieved by triple quadrupole inductively coupled plasma mass spectrometer (TQ-ICP-MS), together with neutron activation analysis (NAA), a method that direct measures the chemical elements in the solid sample that can result in a combination to validate the analytical procedure for determining chemical elements. The Brazil market accounted for USD 6.2 Mn in 2021.
   
• Mexico semiconductor ICP-MS Systems market attributed to the significant growth due to increasing government focus on water treatment. Like ICP-QMS and ICP-SFMS are excellent choices for measurements of these toxic elements in water samples because of high precision and accuracy in routine analysis minutes, while also exhibiting excellent precision and accuracy in routine analysis.  The Mexico market accounted for USD 3.3 Mn in 2034.
   

The semiconductor ICP-MS systems market in Middle East & Africa is expected to experience significant growth of 3.9% in the forecast period. The MEA regional growth is due to increasing investment in establishment of new semiconductor manufacturing facilities.
 

• Saudi Arabia market is attributed to growth due to its demand in traditional medicinal plants commonly used in pharmaceutical industry. In 2021, Saudi Arabia accounted for 43% of the Middle East & Africa market.
   
• South Africa industry is expected to grow at USD 2.8 Mn in 2021. The high growth can be attributed to rapid growth in mineral & mining industry.
   
• The factors supporting the growth of UAE market is attribute to increasing growth in petrochemical industry which is resulting in high demand for ICP-MS systems for quality control and impurity testing. UAE market is expected to grow to USD 7.7 Mn in 2032.
   

Semiconductor ICP-MS Systems Market Share

The competition in the market is shaped by several key factors, with companies striving to stay ahead through a blend of price, innovation, and distribution strategies. The top 5 companies in the global market are Agilent Technologies, Thermo Fisher Scientific, PerkinElmer, Nu Instruments (Ametek Inc.), and Analytik Jena (Endress+Hauser Group), collectively accounting for a share of 43%.
 

However, major players are focused on the introduction of new products in order to attract new customers and strengthen their market share. For instance, in October 2024, Thermo Fisher Scientific announced the launch of iCAP MX Series ICP-MS. The system is designed for environmental, food, industrial and research labs which will help the analyse routine and challenging trace elements to detect and mitigate harmful substances. The new product launch is expected to help company strengthen its position in market.
 

The product demonstrates the innovation in semiconductor ICP-MS systems is setting new industry standards, positioning Horiba Group is a key player in the market. For example, the HORIBA scientific ICP spectrometers, with their innovative design, provide tools that will increase the lab productivity. The robustness of the Ultima ICP spectrometers makes them ideal for applications common to mining, chemicals manufacture, salt production, wear metals in oil analysis, petrochemical, metallurgical production and precious metal refining.
 

Agilent Technologies provides ppt and sub-ppt level detection systems that are essential for ultra-trace metal analysis. The company has a strong global presence which aids in providing extensive technical support. The company competes in the market through establishing strong partnership with semiconductor manufacturers.
 

Thermo Fisher Scientific competes in the market through investing heavily in R&D activities and the introduction of new advanced products.
 

Nu Instruments (Ametek Inc.) provides customizable solutions as per customers’ needs. The company competes in the market through closely working with industry experts for rapid product development.
 

Semiconductor ICP-MS Systems Market Companies

Some of the eminent market participants operating in the industry include:

• Agilent Technologies
• Thermo Fisher Scientific
• PerkinElmer
• Nu Instruments (Ametek Inc.)
• Analytik Jena (Endress+Hauser Group)
   

Semiconductor ICP-MS Systems Industry News

• In August 2024, PerkinElmer introduced the NexION 1100 ICP-MS system, designed specifically for semiconductor applications. This system enhances trace element analysis capabilities, crucial for ensuring the purity of semiconductor materials during manufacturing. The launch aims to meet the increasing demand for high-precision analytical tools in the semiconductor industry.
   
• In October 2024, Thermo Fisher Scientific announced the launch of the iCAP MX Series ICP-MS instruments aimed at simplifying trace element analysis in semiconductor applications. These new instruments are designed to provide high sensitivity and accuracy, addressing the growing need for reliable elemental analysis in semiconductor manufacturing processes.
   

The Semiconductor ICP-MS Systems market research report includes an in-depth coverage of the industry with estimates and forecast in terms of revenue in USD Million & Units from 2021 – 2034 for the following segments:

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Market, By Component

• Hardware
  • Main ICP-MS instrument
  • Plasma generator
  • Mass spectrometer 
• Software

Market, By Product Type

• Single quadrupole ICP-MS
• Triple quadrupole ICP-MS
• Multi-quadrupole ICP-MS
• High resolution ICP-MS
• Multi-collector ICP-MS
• Others

Market, By Technology

• Quadrupole technology
• Magnetic sector technology
• Time-of-Flight (ToF) technology

Market, By Sales Channel

• Direct sales
• Distributors
• Online sales

Market, By Application

• Water analysis
• Environmental analysis
• Pharmaceutical and biomedical research
• Geological and mining research
• Food and beverage testing
• Petrochemical analysis
• Semiconductor analysis
• Others

Market, By End Use Industry

• Semiconductor industry
• Environmental testing laboratories
• Pharmaceutical industry
• Chemical industry
• Research institutions
• Others

The above information is provided for the following regions and countries:

• North America 
  • U.S.
  • Canada
• Europe 
  • Germany
  • UK
  • France
  • Spain
  • Italy
  • Netherlands 
• Asia Pacific 
  • China
  • India
  • Japan
  • Australia
  • South Korea 
• Latin America
  • Brazil
  • Mexico 
• Middle East and Africa
  • Saudi Arabia
  • South Africa
  • UAE