Lithography Metrology Equipment Market Size - By Technology, By Product, By Process, By Application, By End Use Industry and Forecast, 2025 - 2034

Lithography Metrology Equipment Market Size

The global lithography metrology equipment market was valued at USD 755 million in 2024 and is estimated to grow at a CAGR of 7.4% from 2025 to 2034.
 

Advancements in semiconductor technology are a key driver for the lithography metrology equipment industry as manufacturers transition toward smaller and more efficient nodes, such as 7nm, 5nm, and beyond. The development of cutting-edge technologies, including extreme ultraviolet (EUV) lithography, has become critical for producing high-performance chips with increased transistor density. These innovations necessitate precise metrology systems to ensure accuracy in patterning, minimize defects, and optimize yield. As the complexity of semiconductor processes increases, demand for advanced lithography metrology equipment grows to support stringent production standards and meet the evolving needs of semiconductor fabs.
 

For instance, in December 2023, Hitachi High-Tech announced the launch of the GT2000, a high-precision electron beam metrology system designed for advanced semiconductor devices. The system enhances the development and mass production of 3D semiconductors, supporting High-NA EUV resist wafer imaging. As semiconductor technology advances, the GT2000 underscores the growing demand for sophisticated lithography metrology tools, driving the growth of the market.
 

The rising demand for consumer electronics further accelerates this trend, as devices such as smartphones, tablets, and wearables require high-performance, compact integrated circuits (ICs). Miniaturization and efficiency are central to delivering next-generation features, driving manufacturers to adopt advanced lithography processes to achieve higher chip densities. Metrology equipment plays a crucial role in verifying pattern accuracy, identifying deviations, and ensuring quality control during photolithography. This growing reliance on precise inspection and measurement tools fuels market growth as manufacturers strive to meet the surging demand for consumer electronics globally.
 

Lithography Metrology Equipment Market Trends

The lithography metrology equipment industry is evolving with key trends shaping its landscape. B2B consumers, such as semiconductor manufacturers and research institutions, are increasingly adopting advanced metrology solutions to enhance precision in semiconductor fabrication. New materials, such as extreme ultraviolet (EUV) photomasks, and innovations in measurement technologies, like atomic force microscopy (AFM) and optical critical dimension (OCD) metrology, are driving industry advancements. Additionally, the sector is placing significant emphasis on sustainability, with a focus on reducing energy consumption, improving equipment efficiency, and minimizing environmental impact through eco-friendly materials and practices.
 

Lithography Metrology Equipment Market Analysis

The lithography metrology equipment industry faces several restraints, including the high cost of advanced metrology systems and the complexity of integrating new technologies into existing production lines. Regulatory challenges, particularly concerning environmental standards and the disposal of hazardous materials, also pose hurdles. However, significant opportunities lie in the growing demand for miniaturized semiconductor devices, advancements in 5G technology, and the expansion of AI and machine learning applications. Regulatory support for innovation and sustainability, along with the increasing need for precise manufacturing processes, provides a conducive environment for market growth.
 

Based on technology, the lithography metrology equipment market is divided into optical metrology, Critical Dimension Scanning Electron Microscopy (CD-SEM), overlay metrology, Atomic Force Microscopy (AFM), and scatterometry. The Critical Dimension Scanning Electron Microscopy (CD-SEM) segment is expected to reach a value of USD 451.1 million by 2034.
 

Optical metrology dominates the market due to its non-invasive and fast measurement capabilities, which are critical for high-volume semiconductor production. Optical systems, including reflectometry and interferometry, are used to monitor critical parameters such as line width and overlay accuracy. The growth of advanced manufacturing techniques, including EUV lithography, has heightened the demand for optical metrology to ensure high precision during the fabrication process, offering real-time, high-throughput solutions essential for semiconductor scaling.
 

CD-SEM plays a vital role in ensuring the accuracy of critical dimensions in semiconductor fabrication by providing highly detailed and precise measurements at the nanoscale. This technology is widely used for inspecting mask patterns, lithography patterns, and other nanoscale structures. With the increasing demand for smaller and more complex semiconductors, CD-SEM continues to evolve with higher resolution, better throughput, and automation features. Its ability to provide accurate dimensional control in advanced process nodes is driving its adoption in semiconductor fabs.
 

Based on applications, the market is divided into semiconductor manufacturing, Flat Panel Display (FPD) manufacturing, MEMS (Micro-Electro-Mechanical Systems), LED manufacturing and others. The Flat Panel Display (FPD) manufacturing segment is the fastest growing segment with a CAGR of 8.6% between 2025 and 2034.
 

Semiconductor manufacturing is the largest application segment in the market, driven by the continuous demand for smaller, faster, and more efficient devices. With the ongoing trend towards smaller process nodes (such as 7nm, 5nm, and below), precision metrology tools are critical for controlling critical dimensions, overlay accuracy, and material properties. Advanced techniques such as EUV lithography and multi-patterning require highly sophisticated metrology solutions, ensuring that devices meet strict performance and yield standards. This segment’s growth is tied to innovations in semiconductor technologies, including AI, 5G, and IoT, which drive the need for cutting-edge metrology systems.
 

In flat panel display (FPD) manufacturing, lithography metrology equipment is increasingly crucial as the industry transitions towards larger displays with higher resolution and performance. With the adoption of OLED and microLED technologies, accurate measurement of layer thickness, resolution, and alignment is essential to ensure the quality of displays. The rising demand for high-definition televisions, smartphones, and other devices is further propelling the need for precise metrology solutions to maintain display uniformity and reduce defects during production, particularly in the context of increasing display sizes and pixel density in next-generation FPDs.
 

U.S. dominated the North America lithography metrology equipment market in 2024, accounting for a share of 87.4%. The U.S. market benefits from its strong position in advanced semiconductor manufacturing and R&D infrastructure. Leading semiconductor companies and fabs are investing heavily in advanced nodes, including 5nm and below, driving demand for precise metrology tools. The market is further propelled by the rapid adoption of EUV lithography and increasing focus on 3D packaging. Robust investments in AI, IoT, and 5G technologies continue to fuel growth for advanced metrology solutions.
 

India market is witnessing steady growth, driven by government initiatives like "Make in India" and increasing foreign investments in semiconductor manufacturing. The country’s rising electronics demand and growing focus on domestic chip production are key market drivers. While infrastructure challenges persist, the push to develop semiconductor fabs is increasing opportunities for metrology equipment providers. Growing demand for consumer electronics and automotive semiconductors further supports market expansion.
 

China lithography metrology equipment market is driven by substantial investments in semiconductor manufacturing as the country prioritizes technological self-sufficiency. Major fabs are expanding their production capacity to meet domestic and global chip demand, fueling adoption of advanced metrology tools. Government-backed initiatives and incentives are fostering local equipment manufacturing and technology development. Additionally, China’s strong presence in consumer electronics and 5G technologies bolsters the market’s growth potential.
 

South Korea market is primarily led by the country’s dominance in memory semiconductor manufacturing, with key players investing in advanced nodes and EUV lithography. The market benefits from strong demand for DRAM and NAND flash chips used in consumer electronics and 5G infrastructure. Investments in high-volume production and quality control drive demand for precise metrology solutions. South Korea’s leadership in semiconductor innovation ensures steady adoption of advanced equipment.
 

Japan market is supported by its long-standing expertise in semiconductor equipment manufacturing and precision engineering. The country’s semiconductor fabs are investing in advanced metrology tools to enhance accuracy and reduce defects in advanced packaging and lithography processes. Japan’s strong industrial base in consumer electronics and automotive applications creates consistent demand for high-quality semiconductor chips. Collaborations with global players further strengthen its role in the metrology equipment market.
 

Lithography Metrology Equipment Market Share

Competition in the lithography metrology equipment industry is primarily driven by factors such as technological innovation, product performance, and differentiation. Key players focus on delivering highly precise, cutting-edge measurement solutions to meet the evolving needs of semiconductor manufacturers. Price remains an important factor, especially for cost-sensitive applications, while companies differentiate themselves through the integration of advanced technologies, such as EUV and optical metrology systems. Distribution networks and customer service also play a crucial role, as manufacturers seek reliable, global support. As technological advancements continue, competition is likely to intensify around providing more efficient, scalable, and sustainable solutions.
 

Lithography Metrology Equipment Market Companies

Major players operating in the lithography metrology equipment industry are:

• ASML Holding NV
• Nikon Corporation
• EV Group
• Applied Materials Inc
• KLA Corporation
• Onto innovation
• Canon Inc.
• Hitachi High-Tech Corporation
• Thermo Fisher Scientific Inc.
   

Lithography Metrology Equipment Industry News

• In November 2023, ASML expanded its presence in China with nearly 1,400 lithography and metrology machines installed, reflecting its significant role in the country’s semiconductor industry. The company expanded its production capabilities, aiming for 500-600 deep ultraviolet (DUV) machines annually.
   
• In March 2023, EUV Tech announced securing Series A funding led by Intel Capital to advance its lithography metrology equipment for semiconductor manufacturing. The funds will enhance its product line, including EUV reflectometers and mask metrology tools. As EUV lithography demand grows, EUV Tech continues to support high-volume production and drive innovation in advanced chip manufacturing.
   
• In March 2023, Picarro announced the launch of the SLiM 100 Lithography Process Tool Monitoring System, a 1-ppb class chemical metrology solution designed for real-time VOC detection in semiconductor fabs. The system improves process control by identifying airborne molecular contamination, reducing defects, and enhancing yield. It enables faster issue resolution, minimizing downtime and production costs in lithography tools.
   

This lithography metrology equipment market research report includes in-depth coverage of the industry with estimates & forecast in terms of revenue (USD Billion/Million) & volume (Units) from 2021 to 2034, for the following segments:

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Market, By Technology

• Optical metrology
• Critical Dimension Scanning Electron Microscopy (CD-SEM)
• Overlay metrology
• Atomic Force Microscopy (AFM)
• Scatterometry

Market, By Product

• Chemical control equipment
• Gas control equipment
• Others

Market, By Process

• Edge
• Cloud

Market, By Application

• Semiconductor manufacturing
• Flat Panel Display (FPD) manufacturing
• MEMS (micro-electro-mechanical systems)
• LED manufacturing
• Others

Market, By End Use Industry

• Integrated device manufacturers (IDMs)
• Foundries

The above information is provided for the following regions and countries:

• North America
  • U.S.
  • Canada
• Europe
  • UK
  • Germany
  • France
  • Italy
  • Spain
  • Russia
• Asia Pacific
  • China
  • India
  • Japan
  • South Korea
  • Australia 
• Latin America
  • Brazil
  • Mexico
• MEA
  • UAE
  • Saudi Arabia
  • South Africa