Atomic Layer Deposition (ALD) Equipment Market - By Equipment, By Deposition Method, By Film Type, By Application and Forecast, 2025 - 2034

Atomic Layer Deposition Equipment Market Size

The global atomic layer deposition equipment market was valued at USD 4.3 billion in 2024 and is anticipated to grow at a CAGR of 10.6% between 2025 to 2034.
 

ALD equipment is used in semiconductor fabrication and various industries to deposit thin films with precise thickness and uniformity. It applies alternating gas-phase chemical reactions to create ultra-thin layers on substrates, enabling precise control over material properties. ALD equipment plays a critical role in the production of advanced semiconductor devices, coatings, and functional materials for electronics, energy storage, and other applications.
 

The rising need for semiconductor devices brought on by the wide use of smartphones, IoT devices, and developing technologies, such as 5G and Artificial Intelligence (AI), is impacting the market for ALD equipment. ALD technology, which offers accurate and consistent thin-film deposition for enhanced performance and reliability, is essential for producing sophisticated semiconductor devices. As the demand for semiconductors continues to rise, there is a growing need for ALD equipment to meet the precise specifications of modern device fabrication processes.
 

For instance, in March 2023, Tokyo Electron Limited. announced a new development facility at the Hosaka office in Nirasaki City, Yamanashi Prefecture. This expansion focuses on continuous technological advancements to make semiconductors more diverse and complex. To meet the increasing demand from the semiconductor industry, the company is also investing extensively in the development of new facilities.
 

The need for ALD equipment is attributed to the increasing industry adoption of nanotechnology. Applications in nanotechnology can benefit from ALD's ability to deposit ultra-thin films with atomic-level precision. The need for precise material deposition in a variety of industries including electronics, healthcare, and energy is fueling the adoption of ALD equipment, establishing it as a key technology in the advancement of nanotechnology-based innovations.
 

Atomic Layer Deposition Equipment Market Trends

The need for advanced semiconductor fabrication technologies, such as ALD, is driven by the growing demand for miniaturized electronic devices, such as wearables, smartphones, and Internet of Things (IoT) gadgets. The increasing utilization of nanotechnology in various sectors, such as electronics, healthcare, and energy, has made the accurate thin film deposition capabilities provided by ALD equipment indispensable. The need for ALD coatings in energy storage devices, solar cells, and LED lighting is increasing due to the growing emphasis on sustainability and energy efficiency.
 

The growing applications of ALD outside of traditional semiconductor manufacturing, such as MEMS devices, sensors, and biomedical devices, are contributing to market expansion. Continuous developments in ALD technology, such as increased throughput, better film uniformity, and the creation of new materials, are propelling market expansion by raising the appeal and applicability of ALD across a wider range of industries. These factors support the ALD equipment market's upward trajectory.
 

Atomic Layer Deposition Equipment Market Analysis

The ALD equipment market faces challenges related to material compatibility and integration. The technology requires extensive testing to ensure proper functionality across different substrates, materials, and device architectures. Manufacturing processes demand thorough characterization and optimization to achieve adequate adhesion and interface quality. These compatibility issues need resolution for broader ALD technology adoption, especially in applications requiring multi-layered structures or heterogeneous integration.
 

The expanding semiconductor industry and increasing demand for miniaturized electronic devices is leveraging various growth opportunities for the ALD (Atomic Layer Deposition) Equipment Market across the globe. The advancement toward complex 3D architectures and transistor scaling requires ALD's capability to deposit ultra-thin, conformal films with atomic-level precision. This technology enables the production of advanced chips with improved performance and reduced power consumption for smartphones, AI processors, and IoT devices. The progression in semiconductor node technology creates substantial opportunities for ALD equipment manufacturers.
 

Based on deposition method, the atomic layer deposition equipment market is segmented into plasma-enhanced ALD, thermal ALD, spatial ALD, power ALD, and others. Spatial ALD segment is segment is expected to reach a value of over USD 4.5 billion by 2034.
 

• Spatial ALD, a variation of traditional ALD, is gaining popularity due to its unique capabilities. Unlike conventional ALD, which deposits thin films uniformly across a substrate, spatial ALD allows for selective deposition in specific areas, providing greater flexibility and efficiency when manufacturing complex devices. This technology is especially useful for applications that require precise control over material placement such as MEMS devices, sensors, and advanced packaging.
   
• Spatial ALD's ability to deposit thin films on non-planar and three-dimensional surfaces broadens its applications in emerging industries such as wearable electronics and biomedical devices. As the demand for highly integrated and miniaturized products increases, spatial ALD is poised to play a critical role in enabling advanced manufacturing processes, augmenting its adoption and growth in the ALD equipment market.
   

Based on the application, the market is segmented into computing sector, data centers, consumer electronics, healthcare & biomedical, automotive, and energy & power. The computing sector segment segment is the dominating segment, which is anticipated to account for the market share of 33.2% in 2024.
 

• The ALD equipment market is seeing growth in the computing sector owing to many factors. There is a growing need for sophisticated semiconductor components with improved functionality and dependability due to the growing demand for high-performance computing devices such as servers, data centers, and gaming consoles. ALD technology enables the precise deposition of thin films on semiconductor substrates, increasing device performance and power efficiency.
   
• Optimized semiconductor devices are needed for the wide use of AI, Machine Learning (ML), and big data analytics applications. These devices can be produced using fabrication processes enabled by ALD. The creation of cutting-edge computer architectures, such as neuromorphic and quantum computing, depends on ALD machinery for the production of specialized materials and structures, which fuels the demand for ALD in the computing industry.
   

In North America atomic layer deposition equipment market, it is estimated that U.S. is expected to grow at a CAGR of 11.6% during forecast period. The Atomic Layer Deposition (ALD) equipment market in the United States is poised for growth, driven by advanced technological infrastructure and a strong inclination toward innovation. With robust regulatory frameworks and a high adoption rate of new technologies, businesses find a conducive environment for growth. Increasing investment in R&D across industries and rising demand for enhanced user experiences are fostering rapid market evolution. Collaboration between enterprises and technology providers has resulted in the development of tailored solutions, further propelling market expansion.
 

China's market demonstrates strong growth driven by its large consumer base and ongoing industrialization. Government policies supporting innovation and domestic solutions have increased technology adoption nationwide. The market features both local technological developments and international collaborations. The country's urbanization and expanding digital infrastructure increase the demand for technology applications across industries.
 

The Indian market witnesses substantial growth prospects, supported by consistent economic expansion and widespread industry digitization. Government programs, including "Make in India" and "Digital India," have enhanced the country's innovation infrastructure. The demographic advantage of a young population, combined with improved access to cost-effective technology, results in increased market adoption. The growing presence of international firms strengthens market development through regional innovation initiatives and sustainable growth plans.
 

South Korea atomic layer deposition equipment market is positioned for substantial growth, driven by the country’s technologically advanced society and emphasis on R&D. The presence of globally recognized corporations fosters a competitive yet collaborative ecosystem. High consumer expectations for quality and innovation ensure that cutting-edge solutions are prioritized. Additionally, the market benefits from strong governmental support for next-generation technologies, reinforcing its position as a leader in the regional landscapes.
 

Japan ALD equipment market is experiencing significant growth, driven by its established focus on precision manufacturing and stringent quality standards. The country's advanced technological capabilities complement its systematic approach to continuous improvement. The aging demographic structure drives substantial developments in healthcare and automation technologies, creating sustained demand for innovative solutions. Strategic partnerships between traditional industrial enterprises and technology firms demonstrate Japan's methodical approach to sustainable growth and market stability.
 

Atomic Layer Deposition Equipment Market Share

The market structure varies across regions, with some areas showing fragmentation due to numerous competitors, while others display moderate consolidation with established market leaders. Multinational corporations maintain substantial market share in developed economies, while regional players focus on localized solutions in growing markets. Major companies sustain their positions through research and development investments and global presence, while new entrants compete through specialized innovations and competitive pricing. Companies employ various strategies to maintain competitiveness, including product diversification and development of region-specific solutions. The market witnesses frequent strategic partnerships, mergers, and acquisitions as companies seek to expand their product offerings and geographical reach. New market entrants target underserved market segments with flexible and economical solutions. These competitive dynamics emphasize the importance of adaptability and customer focus for sustained market success.
 

Atomic Layer Deposition Equipment Market Companies

Major players operating in the atomic layer deposition equipment industry are:

• Aixtron SE
• ANRIC Technologies
• Applied Materials, Inc.
• Arradiance, LLC
• ASM International NV
• Beneq Oy
• Cambridge NanoTech
• CVD Equipment Corporation
• Entegris Inc.
• Forge Nano Inc
• Hitachi High-Technologies Corporation
• Kurt J. Lesker Company
• Lam Research Corporation
• Meyer Burger
• MSE Supplies LLC
• Nano-Master, Inc.
• Oxford Instruments plc
• Picosun Oy
• Radiation Monitoring Devices, Inc
• SENTECH Instruments GmbH
• SHOWA SHINKU CO., LTD.
• SVT Associates
• Tokyo Electron Limited
• Veeco Instruments Inc
• Watty Corporation
   

Atomic Layer Deposition Equipment Industry News

• In August 2024, Kalpana Systems, a Dutch thin film equipment manufacturer, has introduced spatial Atomic Layer Deposition (sALD) tools designed for roll-to-roll manufacturing in industries such as solar photovoltaics, organic LEDs, batteries, and packaging. Kalpana's sALD technology enables high-quality thin layer deposition with atomic precision, supporting industrial web speeds up to 10 meters per minute. The company is developing two models, K300 and K600, both accommodating process temperatures between 80°C and 150°C, with the K300 expected to debut in the solar or flexible electronics industries.
   
• In May 2024, Hanwha Precision Machinery announced that the company is developing a thermal Atomic Layer Deposition (ALD) system, I2FIT-Mo, to deposit molybdenum in semiconductor fabrication. Molybdenum offers lower resistivity and avoids fluoride residues, making it a promising material for future DRAM production by companies like Samsung, SK Hynix, and Micron. The prototype is expected to undergo at least three years of refinement and testing before commercialization.
   

This atomic layer deposition equipment market research report includes in-depth coverage of the industry with estimates & forecast in terms of revenue (USD Million/billion) from 2021 to 2034, for the following segments:

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Market, By Equipment

• Batch reactors
• Single-wafer reactors
• Spatial ALD reactors
• Remote plasma ALD reactors

Market, By Deposition Method

• Plasma Enhanced ALD
• Thermal ALD
• Spatial ALD
• Power ALD
• Others

Market, By Film Type

• Metal film
• Oxide film
• Sulfide film
• Nitride film
• Fluoride film

Market, By Application

• Computing sector
• Data centers
• Consumer electronics
• Healthcare and biomedical
• Automotive
• Energy & power

The above information is provided for the following regions and countries:

• North America
  • U.S.
  • Canada
• Europe
  • Germany
  • UK
  • France
  • Italy
  • Spain
  • Rest of Europe
• Asia Pacific
  • China
  • India
  • Japan
  • South Korea
  • ANZ
  • Rest of Asia Pacific
• Latin America
  • Brazil
  • Mexico
  • Rest of Latin America
• MEA
  • UAE
  • Saudi Arabia
  • South Africa
  • Rest of MEA